SEMICONDUCTOR MANUFACTURING

Class 100 Cleanroom Retrofit Design

Durham, NC
Completed 2024

Key Technical Features

Prime/Project Lead

Essential Engineering was responsible for managing our key design partners including the Architect, Structural Engineer and Controls Engineer to deliver a turn-key design to the client.

Walkable Ceilings within Existing Facility

Coordinated demolition and/or relocation of existing utilities above new designated cleanroom space to incorporate a walkable ceiling with Fan Powered HEPA Filters (FFU) for ease of maintenance and service and to achieve required air changes per hour.

Renovation in Existing Facility

Renovation of dry laboratory space into a Class 100 cleanroom with wet chemistry fume hoods, Acid Exhaust, Grade I Water, Process Vacuum, Process Gases and Acid and Process Waste Systems.

Cleanroom interior Control room
HVAC system

Project Overview

Essential Engineering designed the MEP systems for a 5,000 square foot renovation to an existing semiconductor fab. The design required detailed coordination for intgegrating new MEP systems into existing systems while minimizing or eliminating shutdowns that would impact critical operations of adjacent spaces.

Design Highlights

Space Constaints

Due to space constraints a new air handling unit to provide the required air changes per hour was not an option. After our on site investigation and finalzing the load calculations Essential Engineering determined an existing make-up air unit had sufficient capacity to provide the required airflow to effecetively pressurize the cleanroom and offset both the sensible and exhaust loads. The required air changes per hour was achieved by utilizing fan powered HEPA units (FFU). The design also included a new humidificaiton system dedicated to the project.

Cleanroom Systems

ISO Class 3 (Class 1) minienvironments with 0.5μm particle control, temperature stability ±0.1°C, and humidity control ±1% RH.

Engineered Waste Systems

Acid and Process Waste Systems

Specialty Gases

Ultra-high purity Nitrogen, Oxygen, Compressed Dry Air, Process Vacuum, Grade I Deionized Water

Project Details

Client

Wolfspeed

Size

5,000 square foot expansion

Completion

2024

Services

  • Cleanroom Design
  • HVAC
  • Ultra-High Purity Gas Distribution
  • Acid & Process Exhaust Systems
  • Acid & Process Waste Systems

Technical Specifications

Environmental Controls

  • ISO Class 3 (Class 1) minienvironments
  • Temperature control: 22°C ±0.1°C
  • Humidity control: 45% ±1% RH
  • Air changes: 250-300 per hour
  • HEPA filtration: 99.999% at 0.12μm

Utility Systems

  • Ultrapure water: 18.2 MΩ·cm>
  • Process cooling water: ±0.1°C stability
  • Bulk gas delivery: 50+ systems
  • Power quality: <2% voltage variation
  • Vibration: VC-D criteria for EUV tools

"Essential Engineering's expertise in semiconductor facility design was critical in achieving our aggressive ramp schedule. Their vibration control solutions allowed us to install EUV tools with no yield-impacting issues."

Sarah Chen

VP of Fab Operations, Client Company

Planning a Fab Expansion or Upgrade?

Our team specializes in semiconductor facility design with deep expertise in advanced node requirements.

Contact Our Team