Essential Engineering was responsible for managing our key design partners including the Architect, Structural Engineer and Controls Engineer to deliver a turn-key design to the client.
Coordinated demolition and/or relocation of existing utilities above new designated cleanroom space to incorporate a walkable ceiling with Fan Powered HEPA Filters (FFU) for ease of maintenance and service and to achieve required air changes per hour.
Renovation of dry laboratory space into a Class 100 cleanroom with wet chemistry fume hoods, Acid Exhaust, Grade I Water, Process Vacuum, Process Gases and Acid and Process Waste Systems.
Essential Engineering designed the MEP systems for a 5,000 square foot renovation to an existing semiconductor fab. The design required detailed coordination for intgegrating new MEP systems into existing systems while minimizing or eliminating shutdowns that would impact critical operations of adjacent spaces.
Due to space constraints a new air handling unit to provide the required air changes per hour was not an option. After our on site investigation and finalzing the load calculations Essential Engineering determined an existing make-up air unit had sufficient capacity to provide the required airflow to effecetively pressurize the cleanroom and offset both the sensible and exhaust loads. The required air changes per hour was achieved by utilizing fan powered HEPA units (FFU). The design also included a new humidificaiton system dedicated to the project.
ISO Class 3 (Class 1) minienvironments with 0.5μm particle control, temperature stability ±0.1°C, and humidity control ±1% RH.
Acid and Process Waste Systems
Ultra-high purity Nitrogen, Oxygen, Compressed Dry Air, Process Vacuum, Grade I Deionized Water
Wolfspeed
5,000 square foot expansion
2024
"Essential Engineering's expertise in semiconductor facility design was critical in achieving our aggressive ramp schedule. Their vibration control solutions allowed us to install EUV tools with no yield-impacting issues."
Sarah Chen
VP of Fab Operations, Client Company
Our team specializes in semiconductor facility design with deep expertise in advanced node requirements.
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